Excellent etching on single-layer Al and Al alloy films and Mo and Mo alloy films, as well as on stacked Mo/Al/Mo, Mo alloy, Al alloy, and Mo alloy films

Keywords: wet etching, aluminum, molybdenum, AlCu, MAM, stacked film

Features

• Forming excellent forward taper
• Small side etching amount and fine pattern forming
• Optimized etching rate and excellent uniformity