Hayashi Pure Chemical Ind., Ltd.


Product Description

Film Etchant

TiW Etchant Pure Etch TE series

Excellent etching of TiW films Etching performance varies with the film-forming technique employed and the specific film structure. Contact us for more information.

Keywords: wet etching, tungsten-titanium alloy


  • Forming excellent forward taper
  • Small side etching and fine pattern forming
  • Excellent uniformity of etching rate and etching profile
  • No residue after etching