Excellent insulation etching of Al and Al alloy films without corrosion
This series includes products for etching and Si natural oxide film removal.

Keywords: wet etching, SiO2, SiN, TEOS, silicon dioxide film, silicon nitride film

Features

• Less chemical damage on Al and Al alloy film
• Forming excellent forward taper
• Forming via and pad process by wet etching
• Also used as a pretreatment for Pure Etch 160 (Al Damageless Si Etchant).