Al Damageless Insulating Film Etchant Pure Etch ZE series
Excellent insulation etching of Al and Al alloy films without corrosion
This series includes products for etching and Si natural oxide film removal.
Keywords: wet etching, SiO2, SiN, TEOS, silicon dioxide film, silicon nitride film
- Less chemical damage on Al and Al alloy film
- Forming excellent forward taper
- Forming via and pad process by wet etching
- Also used as a pretreatment for Pure Etch 160 (Al Damageless Si Etchant).