Standard products of Ti Etchant & Ti Seed Layer Etchant Pure Etch TE series
Excellent etching of Ti films
This series includes products for standard thin film etching and Ti seed layer etching.
Keywords: wet etching, titanium
- Small side etching and fine pattern forming
- Excellent uniformity of etching rate and etching profile
- Suitable for stacked film (ex. Cu/Ti, W/Ti)