Hayashi Pure Chemical Ind., Ltd.


Product Description

Film Etchant

Standard products of Ti Etchant & Ti Seed Layer Etchant Pure Etch TE series

Excellent etching of Ti films
This series includes products for standard thin film etching and Ti seed layer etching.

Keywords: wet etching, titanium


  • Small side etching and fine pattern forming
  • Excellent uniformity of etching rate and etching profile
  • Suitable for stacked film (ex. Cu/Ti, W/Ti)