Hayashi Pure Chemical Ind., Ltd.


Product Description

Film Etchant

Al, Mo, Mo/Al/Mo Standard products of Stacked Film Pure Etch AS series

Excellent etching on single-layer Al and Al alloy films and Mo and Mo alloy films, as well as on stacked Mo/Al/Mo, Mo alloy, Al alloy, and Mo alloy films

Keywords: wet etching, aluminum, molybdenum, AlCu, MAM, stacked film


  • Forming excellent forward taper
  • Small side etching and fine pattern forming
  • Excellent uniformity of etching rate and etching profile

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